Microwave plasmas at atmospheric pressure: New theoretical developments and applications in surface science
Résumé
Specificity of microwave plasmas created at atmospheric pressure is presented. Plasma is created in a quartz tube placed in a microwave cavity. The cavity is powered with a MW generator at the frequency of 2.45 GHz. Interesting results are obtained using a pulsed discharge with the frequency of few kHz. New phenomena such as filamentation are presented and described together with possible applications of such sources of reactive plasma particles.