New insights on the chemistry of plasma-enhanced atomic layer deposition of indium oxysulfide thin films and their use as buffer layers in Cu(In,Ga)Se 2 thin film solar cell - Archive ouverte HAL
Article Dans Une Revue Journal of Vacuum Science & Technology A Année : 2018

New insights on the chemistry of plasma-enhanced atomic layer deposition of indium oxysulfide thin films and their use as buffer layers in Cu(In,Ga)Se 2 thin film solar cell

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Chimie
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hal-02148695 , version 1 (05-06-2019)

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Cathy Bugot, Muriel Bouttemy, Nathanaelle Schneider, Arnaud Etcheberry, Daniel Lincot, et al.. New insights on the chemistry of plasma-enhanced atomic layer deposition of indium oxysulfide thin films and their use as buffer layers in Cu(In,Ga)Se 2 thin film solar cell. Journal of Vacuum Science & Technology A, 2018, 36 (6), pp.061510. ⟨10.1116/1.5048124⟩. ⟨hal-02148695⟩
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