@inproceedings{legendre:hal-02134839, TITLE = {{(Sr,La)-(Ta,Ti)-O-N perovskite oxide and oxynitride films: influence of the deposition and annealing conditions on the structure and electrical properties}}, AUTHOR = {Le Gendre, Laurent and Le Paven, Claire and Haydoura, Mohamad and Benzerga, Ratiba and Marlec, Florent and Sharaiha, Ala and Tessier, Franck and Chevir{\'e}, Fran{\c c}ois}, URL = {https://hal.science/hal-02134839}, BOOKTITLE = {{10th International Symposium on NiTrides (ISNT 2019)}}, ADDRESS = {Barcelone, Spain}, YEAR = {2019}, MONTH = Jun, HAL_ID = {hal-02134839}, HAL_VERSION = {v1}, }