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Article Dans Une Revue Optics Letters Année : 2017

Single-shot ultrafast laser processing of high-aspect-ratio nanochannels using elliptical Bessel beams

Résumé

Ultrafast lasers have revolutionized material processing, opening a wealth of new applications in many areas of science. A recent technology that allows the cleaving of transparent materials via non-ablative processes is based on focusing and translating a high-intensity laser beam within a material to induce a well-defined internal stress plane. This then enables material separation without debris generation. Here, we use a non-diffracting beam engineered to have a transverse elliptical spatial profile to generate high-aspect-ratio elliptical channels in glass of a dimension 350  nm×710  nm and subsequent cleaved surface uniformity at the sub-micron level.

Dates et versions

hal-02134479 , version 1 (20-05-2019)

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Rémi Meyer, Maxime Jacquot, Remo Giust, Jassem Safioui, Ludovic Rapp, et al.. Single-shot ultrafast laser processing of high-aspect-ratio nanochannels using elliptical Bessel beams. Optics Letters, 2017, 42 (21), pp.4307-4310. ⟨10.1364/OL.42.004307⟩. ⟨hal-02134479⟩
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