Photoluminescence monitored photocorrosion for metrology of GaAs/AlGaAs heterostructures at the nanoscale: digital etching of GaAs: a 30-year (almost) perspective - Archive ouverte HAL Accéder directement au contenu
Communication Dans Un Congrès Année : 2017
Fichier non déposé

Dates et versions

hal-02097249 , version 1 (11-04-2019)

Identifiants

  • HAL Id : hal-02097249 , version 1

Citer

Jan J. Dubowski, Srivatsa Aithal. Photoluminescence monitored photocorrosion for metrology of GaAs/AlGaAs heterostructures at the nanoscale: digital etching of GaAs: a 30-year (almost) perspective. SPIE LASE, 2017, Jan 2017, San Fransisco, United States. ⟨hal-02097249⟩
20 Consultations
0 Téléchargements

Partager

Gmail Mastodon Facebook X LinkedIn More