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Journal Articles Surface and Coatings Technology Year : 2002

Surface and bulk characterizations of CNx thin films made by r.f. magnetron sputtering

F. Tétard
  • Function : Author
B. Angleraud
  • Function : Author
P. Tessier
  • Function : Author

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hal-02095970 , version 1 (11-04-2019)

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Florent Tetard, F. Tétard, P. Djemia, B. Angleraud, N. Mubumbila, et al.. Surface and bulk characterizations of CNx thin films made by r.f. magnetron sputtering. Surface and Coatings Technology, 2002, 151-152, pp.184-188. ⟨10.1016/S0257-8972(01)01574-2⟩. ⟨hal-02095970⟩
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