Mechanical and physicochemical properties of AlN thin films obtained by pulsed laser deposition - Archive ouverte HAL Access content directly
Journal Articles Superlattices and Microstructures Year : 2004

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hal-02095968 , version 1 (11-04-2019)

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Florent Tetard, C. Cibert, F. Tétard, P. Djemia, C. Champeaux, et al.. Mechanical and physicochemical properties of AlN thin films obtained by pulsed laser deposition. Superlattices and Microstructures, 2004, 36 (4-6), pp.409-416. ⟨10.1016/j.spmi.2004.09.055⟩. ⟨hal-02095968⟩
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