Journal Articles
Superlattices and Microstructures
Year : 2004
Florent Tétard : Connect in order to contact the contributor
https://hal.science/hal-02095968
Submitted on : Thursday, April 11, 2019-12:35:18 AM
Last modification on : Friday, March 24, 2023-2:53:10 PM
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Florent Tetard, C. Cibert, F. Tétard, P. Djemia, C. Champeaux, et al.. Mechanical and physicochemical properties of AlN thin films obtained by pulsed laser deposition. Superlattices and Microstructures, 2004, 36 (4-6), pp.409-416. ⟨10.1016/j.spmi.2004.09.055⟩. ⟨hal-02095968⟩
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