Journal Articles
Thin Solid Films
Year : 2005
Florent Tétard : Connect in order to contact the contributor
https://hal.science/hal-02095967
Submitted on : Thursday, April 11, 2019-12:32:52 AM
Last modification on : Friday, March 24, 2023-2:53:10 PM
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Florent Tetard, F. Tétard, P. Djemia, P. Besland, P. Tessier, et al.. Characterizations of CNx thin films made by ionized physical vapor deposition. Thin Solid Films, 2005, 482 (1-2), pp.192-196. ⟨10.1016/j.tsf.2004.11.172⟩. ⟨hal-02095967⟩
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