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Journal Articles Thin Solid Films Year : 2005

Characterizations of CNx thin films made by ionized physical vapor deposition

F. Tétard
  • Function : Author
P. Besland
  • Function : Author
P. Tessier
  • Function : Author
B. Angleraud
  • Function : Author

Dates and versions

hal-02095967 , version 1 (11-04-2019)

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Florent Tetard, F. Tétard, P. Djemia, P. Besland, P. Tessier, et al.. Characterizations of CNx thin films made by ionized physical vapor deposition. Thin Solid Films, 2005, 482 (1-2), pp.192-196. ⟨10.1016/j.tsf.2004.11.172⟩. ⟨hal-02095967⟩
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