Ultra Low Energy Ion Beam Synthesis: An Original Method for the Fabrication of Nanocrystals in Dielectrics for Nanoelectronics, Nano-Optics and Plasmonic Applications - Archive ouverte HAL
Communication Dans Un Congrès Année : 2016

Ultra Low Energy Ion Beam Synthesis: An Original Method for the Fabrication of Nanocrystals in Dielectrics for Nanoelectronics, Nano-Optics and Plasmonic Applications

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hal-02079238 , version 1 (25-03-2019)

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  • HAL Id : hal-02079238 , version 1

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G. Ben Assayag, C. Carles, Caroline Bonafos, B. Pecassou, Xavier Hebras, et al.. Ultra Low Energy Ion Beam Synthesis: An Original Method for the Fabrication of Nanocrystals in Dielectrics for Nanoelectronics, Nano-Optics and Plasmonic Applications. CMOS Emerging Technologies, CMOSET 2016, May 2016, Montreal, Canada. ⟨hal-02079238⟩
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