Calibration-less method for measuring pressure with microfabricated Pirani gauges - Archive ouverte HAL
Communication Dans Un Congrès Année : 2017
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hal-02074710 , version 1 (20-03-2019)

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Pascal Newby, Kevin Kornelsen, Cedric Spits, Luc Frechette. Calibration-less method for measuring pressure with microfabricated Pirani gauges. 2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), Jun 2017, Kaohsiung, Taiwan. pp.778-781, ⟨10.1109/TRANSDUCERS.2017.7994164⟩. ⟨hal-02074710⟩
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