Conference Papers
Year : 2018
Claude Yugma : Connect in order to contact the contributor
https://hal.science/hal-02067544
Submitted on : Thursday, March 14, 2019-11:56:56 AM
Last modification on : Saturday, April 20, 2024-3:15:21 AM
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- HAL Id : hal-02067544 , version 1
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Aabir Chouichi, Jakey Blue, Claude Yugma, François Pasqualini. THE DETECTION AND THE CONTROL OF MACHINE/CHAMBER MISMATCHING IN SEMICONDUCTORMANUFACTURING. Winter Simulation Conference (WSC) 2018, Dec 2018, Gotheborg, Sweden. ⟨hal-02067544⟩
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