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Communication Dans Un Congrès Année : 2018

Heterogranular multivariate analytics for detecting and controlling the root causes of the mismatching machines in semiconductor manufacturing

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hal-02067516 , version 1 (14-03-2019)

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  • HAL Id : hal-02067516 , version 1

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Aabir Chouichi, Jakey Blue, Claude Yugma, François Pasqualini. Heterogranular multivariate analytics for detecting and controlling the root causes of the mismatching machines in semiconductor manufacturing. 29th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC), Apr 2018, Saratog, New York, United States. ⟨hal-02067516⟩
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