Article Dans Une Revue Thin Solid Films Année : 1998

Influence of substrate temperature and target composition on the properties of yttria-stabilized zirconia thin films grown by r.f. reactive magnetron sputtering

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Electronique

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hal-02048544 , version 1 (25-02-2019)

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A. Boulouz, Alain Giani, M. Boulouz, A. Boyer. Influence of substrate temperature and target composition on the properties of yttria-stabilized zirconia thin films grown by r.f. reactive magnetron sputtering. Thin Solid Films, 1998, 323 (1-2), pp.85-92. ⟨10.1016/S0040-6090(97)01053-5⟩. ⟨hal-02048544⟩
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