An industrializable Silicon-based microhotplate for metal oxides gas sensors
Résumé
This article presents an industrializable silicon-based microhotplate for metal oxide gas sensors. It introduces an interesting approach and describes the technological optimizations used to reach high and stable operating temperature, in reducing intrinsic drift problems (due to commercial polysilicon heater). The microhotplate present low consumption of 70 mW for 600°C, good thermal homogeneity over the active area and a good mechanical stability.
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An industrializable Silicon-based microhotplate for metal oxides gas sensors pcn-1.pdf (796.54 Ko)
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