Communication Dans Un Congrès Année : 2017

Native oxide limited cross-plane thermal transport in suspended silicon membranes revealed by scanning thermal microscopy

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hal-02031332 , version 1 (20-02-2019)

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  • HAL Id : hal-02031332 , version 1

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A.M. Massoud, J.M. Bluet, Valeria Lacatena, Maciej Haras, J.F. Robillard, et al.. Native oxide limited cross-plane thermal transport in suspended silicon membranes revealed by scanning thermal microscopy. GDRe Workshop on Thermal Nanosciences and NanoEngineering, Nov 2017, Lille, France. ⟨hal-02031332⟩
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