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Article Dans Une Revue Microelectronic Engineering Année : 2011

Fine control of critical dimension for the fabrication of large bandgap high frequency photonic and phononic crystals

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hal-02025087 , version 1 (19-02-2019)

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  • HAL Id : hal-02025087 , version 1

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J. Cuffe, D. Dudek, N. Kehagias, V. Reboud, Pierre-Olivier Chapuis, et al.. Fine control of critical dimension for the fabrication of large bandgap high frequency photonic and phononic crystals. Microelectronic Engineering, 2011, 88 (8), pp.2233-2235. ⟨hal-02025087⟩
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