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Article Dans Une Revue Applied Physics Letters Année : 2017

Native-oxide limited cross-plane thermal transport in suspended silicon membranes revealed by scanning thermal microscopy

Résumé

By thermally characterizing nanometer-thin suspended silicon membranes with various micrometric lengths in ambient conditions, we determine simultaneously the spatial resolution of our Wollaston-probe scanning thermal microscopy experiment, which probes an area of (285 nm)2, and the effective thermal conductivity of the membranes of 40 W.m-1.K-1. This value is smaller thanthe in-plane thermal conductivity measured using other techniques in vacuum (60 W.m-1.K-1), revealing that both cross-plane and in-plane heat conduction are strongly affected by the native oxide in ambient conditions. This work also underlines that high-thermal conductivity samples can be characterized by scanning thermal microscopy when micro-patterned.
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hal-02025076 , version 1 (27-05-2022)

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A. Massoud, J.-M. Bluet, V. Lacatena, M. Haras, J.F. Robillard, et al.. Native-oxide limited cross-plane thermal transport in suspended silicon membranes revealed by scanning thermal microscopy. Applied Physics Letters, 2017, 111 (6), pp.063106. ⟨10.1063/1.4997914⟩. ⟨hal-02025076⟩
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