In situ X-ray studies during the early stage of ZnO Atomic Layer Deposition on InGaAs - Archive ouverte HAL
Communication Dans Un Congrès Année : 2017

In situ X-ray studies during the early stage of ZnO Atomic Layer Deposition on InGaAs

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Matériaux
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hal-02016916 , version 1 (13-02-2019)

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  • HAL Id : hal-02016916 , version 1

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E Skopin, L. Rapenne, H. Roussel, J.-L. Deschanvres, A. Crisci, et al.. In situ X-ray studies during the early stage of ZnO Atomic Layer Deposition on InGaAs. Rayons X & Matière, Nov 2017, Villeneuve d'Ascq, France. ⟨hal-02016916⟩
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