Functionalization of Si-Based NW FETs for DNA Detection
Résumé
In the case of single nanowire for nano‐FET biodetection, a localized and selective biomodification process is required. The aim is notably to confine the biomolecules on the NW and to protect the NW immediate environment (metal contacts) from the functionalization reagents which may alter them and thus alter the signal. Therefore, it is clear that the NW functionalization process is a key step in the fabrication of the bio NWFET. This chapter presents the DNA functionalization using the silane chemistry which has been performed on two different and original Si‐based NW devices: randomly oriented Si NW networks, also called “nanonets”; and SiC single nanowires (NWs). A nanonet has several unique properties that arise either from the individual components, the NWs or NTs, or from the structural properties of the network itself. The aim is to functionalize SiC NWs to make nanobio‐FET transistors for high DNA sensitivity.