Planar glass integrated optical structure based on prism decoupling for sensing applications
Résumé
We present the design of an innovating integrated planar structure adapted for intensity or phase measurements. It is based on the evanescent prism decoupling of the optical signal from a waveguide used as the sensing element. The device is formed by successive thin film sputtering deposition. A TiO2 crystalline layer forms the gas sensing element from which light is coupled out by a planar high refractive index prism. We experimentally validate the structure.