CO2 Gas Sensor Based on BaTiO3 Thin Film Deposited via Ultrasonic Spray
Résumé
A new approach for thin layer deposition to elaborate CO 2 sensitive layers is demonstrated in this work. BaTiO 3 was used as CO 2 sensitive materials and SnO 2 as a reference as well as to enhance the resistance of BaTiO 3 film. BaTiO 3 solution was elaborated by the dispersion of commercial nano-powder in ethanol. A simple sol-gel in ethanol was used to synthesize SnO 2 precursor. Sn02 and BaTiO 3 -SnO 2 thin films were deposited on SiO 2 substrate by ultrasonic spray method. SnO 2 shows no response to CO 2 while BaTi03-Sn02 gives response to 400 and 4000 ppm of CO 2 . These results are promising to continue working with this method.