CO2 Gas Sensor Based on BaTiO3 Thin Film Deposited via Ultrasonic Spray - Archive ouverte HAL Accéder directement au contenu
Ouvrages Année : 2018

CO2 Gas Sensor Based on BaTiO3 Thin Film Deposited via Ultrasonic Spray

Résumé

A new approach for thin layer deposition to elaborate CO 2 sensitive layers is demonstrated in this work. BaTiO 3 was used as CO 2 sensitive materials and SnO 2 as a reference as well as to enhance the resistance of BaTiO 3 film. BaTiO 3 solution was elaborated by the dispersion of commercial nano-powder in ethanol. A simple sol-gel in ethanol was used to synthesize SnO 2 precursor. Sn02 and BaTiO 3 -SnO 2 thin films were deposited on SiO 2 substrate by ultrasonic spray method. SnO 2 shows no response to CO 2 while BaTi03-Sn02 gives response to 400 and 4000 ppm of CO 2 . These results are promising to continue working with this method.
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Dates et versions

hal-01969687 , version 1 (04-01-2019)

Identifiants

  • HAL Id : hal-01969687 , version 1

Citer

Mohamad Hijazi, Sandrine Bernardini, Fabien Le Pennec, Khalifa Aguir, Jean-Luc Seguin, et al. (Dir.). CO2 Gas Sensor Based on BaTiO3 Thin Film Deposited via Ultrasonic Spray. IEEE, pp.1-3, 2018, 2018 IEEE SENSORS. ⟨hal-01969687⟩
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