Crack Front Interaction with Self-Emitted Acoustic Waves
Résumé
The interaction of a propagating crack in implanted silicon with self-emitted acoustic waves is studied and reveals the generation of periodic patterns on wafers surfaces after separation. The measurement and identification of the acoustic waves have been experimentally achieved showing the emergence of dominant shear waves acoustic frequencies related to the crack velocity. The surface modifications are made of roughness modulations at large scale due to periodic deviations of the crack front. A physical mechanism explaining the pattern formation is proposed accounting for the observed wavelengths.
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