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Article Dans Une Revue World journal of mechanics Année : 2018

Porous Silicon as Soft Material in Low-Frequency MEMS (MicroElectro-Mechanical Systems) Resonators

A. Sabac

Dates et versions

hal-01914576 , version 1 (07-11-2018)

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Christophe Malhaire, A. Danescu, V. Lysenko, A. Sabac. Porous Silicon as Soft Material in Low-Frequency MEMS (MicroElectro-Mechanical Systems) Resonators. World journal of mechanics, 2018, 08 (11), pp.431 - 443. ⟨10.4236/wjm.2018.811031⟩. ⟨hal-01914576⟩
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