A comparison of measurements performed in in-situ conditions using Raman spectroscopy and Deflection Test in Monofacial Oxidation techniques were employed to study stress states developed in zirconia films grown at 500 °C is presented. The results show a good correlation between recorded Raman peak displacement and sample deflection angle. Considering analyzed volume of the material, Raman analysis represents a local measurement while the deflection test is a global response of the material. Reported stress components: (i) hydrostatic – resulted from Raman spectroscopy and (ii) in-plane – resulted from deflection test technique have been analyzed in comparison to each of the described techniques and aim to explain the behavior of zirconia at high temperatures.