High quality factor photonic resonators for nitride quantum dots
Résumé
We report the realization and the optical study of nitride
photonic resonators dedicated to the blue and UV spectral
range. Microdisks and photonic crystal (PC) cavities are
investigated containing GaN/AlN quantum dots (QDs)
embedded in an AlN waveguide. The PC cavities are fabricated
through the conformal growth of nitrides on a patterned Si
substrate, and present delocalized and confined cavity modes in
their microphotoluminescence spectra, that are compared to
simulations. A large quality factor of 1800 is reached for a
modified L3 cavity. In the case of microdisks, which are
fabricated through a classical top-down approach, the series of
whispering gallery modes (WGMs) with large quality factors
(up to 7300) are observed and analysed.