Performances of 800 nm femtosecond laser ablation on natural and synthetic quartz
Résumé
A commercial femtosecond laser system operating at its fundamental wavelength (l ¼ 800 nm, near Infra-Red) was used to ablate both synthetic and natural quartz on polished and unpolished surfaces. Ablation rates and maximum depths were determined using two distinct optical setups: a 25 mm focal length Cassegrain reflecting objective, and a 50 mm focal length convergent coated lens. All samples were ablated with the same laser beam at E 0 ¼ 1 mJ, t ¼ 60 fs, f ¼ 5 Hz and N ¼ 10-8000 shots. The depth of ablation craters obtained with the lens shows a linear increase with shot number N up to N ¼ 2000 shots. Then the depth increases much less with N and reaches a plateau above N ¼ 3000 shots. Maximum depth was close to 1300 mm for N ¼ 3000 shots. Using the reflecting objective, ablation rate starts from 0.42 mm/shot and decreases rapidly to 0.02 mm/shot at a maximum depth of 350 mm for N ¼ 1500 shots. Ablation thresholds (F th) were calculated for 1 and 10 consecutive shots with energy increasing from E 0 ¼ 0.1-2 mJ/ pulse. Threshold values varies from F th ¼0.1 J.cm À2 (unpolished, 10 shots) to F th ¼ 2.9 J.cm À2 (polished, single shot). The energy penetration of IR-femtosecond laser pulses in quartz has been calculated at l ¼ 271 nm. The low absorption of IR wavelengths in quartz affects the ablation efficiency in the first shots. The associated non-linear effects are visible on a crater FIB foil observed with TEM as progressive high-pressure photomechanical damage developing under the ablation pit. The present study emphasizes the potential of IR-femtosecond laser for ablation of highly transparent material, and provides reliable data for LA-ICP-MS applications in earth sciences.