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Article Dans Une Revue Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms Année : 2006

Optical strain measurement in ultrathin sSOI wafers.

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hal-01902421 , version 1 (23-10-2018)

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J. Munguía, H. Chouaib, J. de La Torre, G. Bremond, C. Bru-Chevallier, et al.. Optical strain measurement in ultrathin sSOI wafers.. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 2006, 253, pp.18. ⟨10.1016/j.nimb.2006.10.007⟩. ⟨hal-01902421⟩
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