Multilayer structures based on porous silicon for photonic applications in the mid-infrared
Résumé
In this work, the fabrication of porous silicon Bragg reflector and vertical micro-cavity on P + silicon substrate is investigated for applications in spectroscopic sensing and environmental monitoring in the Mid Infra-Red field. These optical devices are characterized by FTIR spectrophotometer. This work demonstrates for the first time to our knowledge, the use of an electrochemically prepared Bragg reflectors and vertical micro-resonators based on PSi operating at Mid-IR spectral region (up to 8 µm).
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