Vertically aligned carbon nanotubes (VACNTs) size shrinking through catalyst size reduction: Use of innovative nanodiamonds hard mask technique
Résumé
We demonstrate in this study the possibility to use nanodiamonds particles as hard mask to easily produce catalyst (Nickel) nanoparticles on-wafer with size in the 10-20nm range. These nanoparticles are used to grow vertically aligned carbon nanotubes (VACNTs) by employing a plasma enhanced chemical vapor deposition technic. These narrow VACNTs are grown to produce cold cathodes that will help to test predicted beam divergence scaling with emitter height.
Mots clés
carbon nanotube
field emission
nanodiamond
processing
Nickel
Nanoparticles
Carbon nanotubes
Cathodes
Etching
Scanning electron microscopy
catalysts
masks
plasma CVD
vertically aligned carbon nanotubes
VACNT
catalyst size reduction
nanodiamonds hard mask technique
catalyst nanoparticles
plasma enhanced chemical vapor deposition
size 10 nm to 20 nm