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Article Dans Une Revue Biomicrofluidics Année : 2017

A reproducible method for μ m precision alignment of PDMS microchannels with on-chip electrodes using a mask aligner

Résumé

This paper describes a reproducible method for μm precision alignment of polydimethylsiloxane (PDMS) microchannels with coplanar electrodes using a conventional mask aligner for lab-on-a-chip applications. It is based on the use of a silicon mold in combination with a PMMA sarcophagus for precise control of the parallelism between the top and bottom surfaces of molded PDMS. The alignment of the fabricated PDMS slab with electrodes patterned on a glass chip is then performed using a conventional mask aligner with a custom-made steel chuck and magnets. This technique allows to bond and align chips with a resolution of less than 2 μm.

Dates et versions

hal-01884118 , version 1 (29-09-2018)

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Jonathan Cottet, Clarisse Vaillier, François Buret, Marie Frénéa-Robin, Philippe Renaud. A reproducible method for μ m precision alignment of PDMS microchannels with on-chip electrodes using a mask aligner. Biomicrofluidics, 2017, 11 (6), ⟨10.1063/1.5001145⟩. ⟨hal-01884118⟩
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