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Communication Dans Un Congrès Année : 2018

Micro heat pipe design and fabrication on LTCC

Maïna Sinou
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Daniel Bourreau

Résumé

This paper presents work on micro heat pipe (MHP) fabrication in Low Temperature Cofired Ceramics (LTCC) modules for cooling purpose. The MHPs are fabricated in a 10 layer structure using ESL41020 tape. Different fabrication settings have been tested to minimize swelling and groove deformation. The best result is obtained by using fugitive tape, extended firing profile, and hot lamination at 50°C for 5 minutes with 70 bar pressure.
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Dates et versions

hal-01881235 , version 1 (25-09-2018)

Identifiants

Citer

Malika Tlili, Maïna Sinou, Camilla Kärnfelt, Daniel Bourreau, Alain Peden. Micro heat pipe design and fabrication on LTCC. ESTC 2018 : 7th Electronics System-Integration Technology Conference, Sep 2018, Dresde, Germany. ⟨10.1109/ESTC.2018.8546402⟩. ⟨hal-01881235⟩
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