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Article Dans Une Revue Sensors and Actuators A: Physical Année : 2016

Magnetic field SAW sensors based on magnetostrictive-piezoelectric layered structures: FEM modeling and experimental validation

Meriem Elhosni
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Omar Elmazria
S. Petit-Watelot
Michel Hehn
Sami Hage-Ali
Daniel Lacour
Frederic Sarry

Résumé

This study describes the numerical implementation of accurate and fully coupled physical models in order to investigate the sensitivity of Surface Acoustic Wave (SAW) devices using the magnetoelas-tic interaction with an external magnetic field. The model was first validated using experimental data previously published by Kadota et al. obtained with SAW resonators based on quartz substrates and nickel Inter Digital Transducers (IDTs). The model was then used to optimize the geometry of a new magnetostrictive-piezoelectric layered structure (Ni/ZnO/IDT/LiNbO 3), regarding its sensitivity to the magnetic field intensity. The optimized structure was designed and fabricated and experimental results show a good correlation with the numerical modeling. Simulations also show that if alumina is used instead of ZnO, the Ni/Al 2 O 3 /IDT/LiNbO 3 structure exhibits a sensitivity that is 9 times higher than the one based on ZnO.
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Dates et versions

hal-01875420 , version 1 (17-09-2018)

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Meriem Elhosni, Omar Elmazria, S. Petit-Watelot, Laurent Bouvot, Sergei Zhgoon, et al.. Magnetic field SAW sensors based on magnetostrictive-piezoelectric layered structures: FEM modeling and experimental validation. Sensors and Actuators A: Physical , 2016, 240, pp.41 - 49. ⟨10.1016/j.sna.2015.10.031⟩. ⟨hal-01875420⟩
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