Simulation, characterization and implementation of a new SCR-based device with a turn-off capability for EOS-immune ESD power supply clamps in advanced CMOS technology nodes - Archive ouverte HAL
Article Dans Une Revue Microelectronics Reliability Année : 2018

Simulation, characterization and implementation of a new SCR-based device with a turn-off capability for EOS-immune ESD power supply clamps in advanced CMOS technology nodes

Résumé

A new SCR-based device for ESD protection is presented through TCAD simulation and experimental results on a standalone configuration and for a power supply ESD clamp strategy. The new device can turn-off even if the voltage power supply is applied at its Anode. We use 3D TCAD simulation for understanding its turn-on and turn-off behavior. At the same time, the flexibility of the EOS test bench allows for standalone and power supply clamp characterizations at chip level at ambient and high temperature.
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Dates et versions

hal-01874227 , version 1 (14-09-2018)

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Jorge Loayza, Nicolas Guitard, Bruno Allard, Luong Viet Phung, Blaise Jacquier, et al.. Simulation, characterization and implementation of a new SCR-based device with a turn-off capability for EOS-immune ESD power supply clamps in advanced CMOS technology nodes. Microelectronics Reliability, 2018, 85, pp.176 - 189. ⟨10.1016/j.microrel.2018.04.013⟩. ⟨hal-01874227⟩
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