Characterization of WO<inf>3</inf> layers deposited on quartz and lithium niobate SAW resonators for the design of gas sensors - Archive ouverte HAL Accéder directement au contenu
Communication Dans Un Congrès Année : 2011

Characterization of WO3 layers deposited on quartz and lithium niobate SAW resonators for the design of gas sensors

Résumé

Surface acoustic wave (SAW) gas sensors generally require the use of a reactive layer for molecule adsorption. WO 3 has been identified for a long time as a high potential sensitive layer particularly for NH 3 , NO X , CO, etc. We report here on the characterization of elastic properties of such material using the dispersion behavior of SAW propagating under gratings passivated wich WO 3 films of various thicknesses. Quartz as well as LiNbO 3 SAW devices are used in that purpose, allowing for the derivation of a reliable data set. Complementary structural characterization using direct measurement techniques (DRX, AFM, TEM,) are reported to confirm the analysis deduced from SAW measurements. As a conclusion, the exploitation of WO 3 for SAW-based sensor is discussed.
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hal-01873126 , version 1 (25-05-2021)

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M. David, Madjid Arab, J. Gavarri, D. Rabus, W. Daniau, et al.. Characterization of WO3 layers deposited on quartz and lithium niobate SAW resonators for the design of gas sensors. 2011 Joint conference of the IEEE International Frequency Control and the European Frequency and Time Forum (FCS), May 2011, San Francisco, United States. ⟨10.1109/FCS.2011.5977824⟩. ⟨hal-01873126⟩
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