Characterization of WO3 layers deposited on quartz and lithium niobate SAW resonators for the design of gas sensors
Résumé
Surface acoustic wave (SAW) gas sensors generally require the use of a reactive layer for molecule adsorption. WO 3 has been identified for a long time as a high potential sensitive layer particularly for NH 3 , NO X , CO, etc. We report here on the characterization of elastic properties of such material using the dispersion behavior of SAW propagating under gratings passivated wich WO 3 films of various thicknesses. Quartz as well as LiNbO 3 SAW devices are used in that purpose, allowing for the derivation of a reliable data set. Complementary structural characterization using direct measurement techniques (DRX, AFM, TEM,) are reported to confirm the analysis deduced from SAW measurements. As a conclusion, the exploitation of WO 3 for SAW-based sensor is discussed.
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