Fabrication and micromechanical characterization of polycrystalline diamond microcantilevers - Archive ouverte HAL Accéder directement au contenu
Article Dans Une Revue Microsystem Technologies Année : 2016

Fabrication and micromechanical characterization of polycrystalline diamond microcantilevers

Résumé

The exceptional chemical, mechanical and thermal properties of diamond make this material the ideal choice for resonant MEMS. Micro-cantilevers designed for biochemical applications have been fabricated using CVD diamond. In this work, the mechanical properties of these cantilevers were investigated by two different techniques: bending test using a Contact Surface Profilometer and resonant test, using a Laser Doppler Vibrometer. The Young's Modulus of diamond thin film was estimated by these two tests. For the resonance test, the estimated values are comprised between 930 and 1300 GPa while bending test gives values between 950 and 1030 GPa. The load-displacement characteristics and the fracture point (or ultimate stress) have also been investigated.
Fichier non déposé

Dates et versions

hal-01869221 , version 1 (06-09-2018)

Identifiants

Citer

Maira Possas, Lionel Rousseau, Farbod Ghassemi, Gaelle Bazin Lissorgues, Emmanuel Scorsone, et al.. Fabrication and micromechanical characterization of polycrystalline diamond microcantilevers. Microsystem Technologies, 2016, 22 (3), pp.609 - 615. ⟨10.1007/s00542-015-2625-1⟩. ⟨hal-01869221⟩
42 Consultations
0 Téléchargements

Altmetric

Partager

Gmail Facebook X LinkedIn More