Excitation of dielectric barrier discharge using sinusoidal and nanosecond waveform: application to silicon solar cell
Résumé
Different diffuse dielectric barrier discharges (DBDs) are studied in the same configuration for different applied voltage waveforms: Glow, Townsend-like and radiofrequency (RF) DBD's for a sinusoidal excitation ranging from 50 kHz to 9 MHz and the nano-second repetitive pulsed DBD (NRP-DBD). The power of the RF and the NRP-DBD is 10 to 30 times larger than that of the low frequency DBD's but according to emission spectroscopy the electron energy and thus the energy transfer to the gas are quite different. The consequence on the chemical kinetic is illustrated by the difference in the conditions leading to a SiN:H having the same refractive index.
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