Novel 3D back-to-back diodes ESD protection
Résumé
A 3D technology is used to design ESD protection devices. Based on back-to-back diodes, these devices are dedicated to first stage, external ESD protection. The main feature consists in using deep trenches, usually employed to build capacitors, to design 3D diodes. Specific trench configuration improves cumulative ESD stress robustness.
Origine | Fichiers produits par l'(les) auteur(s) |
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