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Communication Dans Un Congrès Année : 2018

Importance of complete characterization setup on on-wafer TRL calibration in sub-THz range

Résumé

In this paper, we present the effect of different sub-mm and mm-wave probe geometry and topology on the measurement results of dedicated test-structures calibrated with on-wafer TRL. These results are compared against 3D EM simulation of the intrinsic test-structures. To analyze difference between the measured and intrinsic EM simulation results, on-wafer TRL calibration performed on EM simulation results of a dedicated test-structure is also presented.
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Dates et versions

hal-01838050 , version 1 (16-07-2018)

Identifiants

Citer

Chandan Yadav, Marina Deng, Magali de Matos, Sébastien Fregonese, Thomas Zimmer. Importance of complete characterization setup on on-wafer TRL calibration in sub-THz range. 2018 IEEE International Conference on Microelectronic Test Structures (ICMTS), Mar 2018, Austin, United States. ⟨10.1109/ICMTS.2018.8383798⟩. ⟨hal-01838050⟩
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