Importance of complete characterization setup on on-wafer TRL calibration in sub-THz range
Résumé
In this paper, we present the effect of different sub-mm and mm-wave probe geometry and topology on the measurement results of dedicated test-structures calibrated with on-wafer TRL. These results are compared against 3D EM simulation of the intrinsic test-structures. To analyze difference between the measured and intrinsic EM simulation results, on-wafer TRL calibration performed on EM simulation results of a dedicated test-structure is also presented.
| Origine | Fichiers produits par l'(les) auteur(s) |
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