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Article Dans Une Revue Journal of Applied Physics Année : 2015

Appearance of Large Crystalline Domains in VO2 Films Grown on Sapphire (001) and Their Phase Transition Characteristics

Nurul Hanis Azhan
  • Fonction : Auteur
Kui Su
  • Fonction : Auteur
Kunio Okimura

Résumé

We report the first observation of large crystalline domains of several μm-size in VO2 films deposited on Al2O3 (001) substrates by rf-biased reactive sputtering technique. The large crystalline domains, dominated with random in-plane oriented growth of (011)M1-orientation, appear only under adequate substrate biasing, such as 10 W, while most biasing conditions result in conventional nanosized grains of highly oriented (010)M1-orientation. Two temperature-controlled analyses, x-ray diffraction and micro-Raman spectroscopy, have revealed that some parts of large crystalline domains undergo intermediate monoclinic (M2) phase during the thermally-induced structural phase transition from monoclinic (M1) to rutile-tetragonal (R) phase. As an effect of the appearance of large crystalline domains, the film showed in-plane tensile stress, resulting in high TIMT of 69 °C due to the elongation of the V-V distance in its low-temperature monoclinic phase.
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Dates et versions

hal-01831019 , version 1 (05-07-2018)

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Nurul Hanis Azhan, Kui Su, Kunio Okimura, Mustapha Zaghrioui, Joe Sakai. Appearance of Large Crystalline Domains in VO2 Films Grown on Sapphire (001) and Their Phase Transition Characteristics. Journal of Applied Physics, 2015, 117 (24), pp.245314. ⟨10.1063/1.4923223⟩. ⟨hal-01831019⟩
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