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Communication Dans Un Congrès Année : 2014

Optical properties characterization of silicon micro/nanostructures: Towards a predictive reflectance simulation model based on surface topography

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hal-01820310 , version 1 (21-06-2018)

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David Abi Saab, S. Mostarshedi, P. Basset, E. Angelescu, Elodie Richalot. Optical properties characterization of silicon micro/nanostructures: Towards a predictive reflectance simulation model based on surface topography. 2014 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP), Apr 2014, Cannes, France. ⟨10.1109/DTIP.2014.7056693⟩. ⟨hal-01820310⟩
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