Article Dans Une Revue Current Developments in Lens Design and Optical Engineering Xiii Année : 2012

Innovative Guided Mode Method for measuring the Penetration Depth in partially exposed Photoresist Layers

Fichier non déposé

Dates et versions

hal-01810804 , version 1 (08-06-2018)

Identifiants

Citer

Thomas Wood, Vincent Brissonneau, Jean-Baptiste Brueckner, Gerard Berginc, François Flory, et al.. Innovative Guided Mode Method for measuring the Penetration Depth in partially exposed Photoresist Layers. Current Developments in Lens Design and Optical Engineering Xiii, 2012, 8486, ⟨10.1117/12.928692⟩. ⟨hal-01810804⟩
121 Consultations
0 Téléchargements

Altmetric

Partager

  • More