Innovative Guided Mode Method for measuring the Penetration Depth in partially exposed Photoresist Layers - Archive ouverte HAL Accéder directement au contenu
Article Dans Une Revue Current Developments in Lens Design and Optical Engineering Xiii Année : 2012
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hal-01810804 , version 1 (08-06-2018)

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Thomas Wood, Vincent Brissonneau, Jean-Baptiste Brueckner, Gerard Berginc, François Flory, et al.. Innovative Guided Mode Method for measuring the Penetration Depth in partially exposed Photoresist Layers. Current Developments in Lens Design and Optical Engineering Xiii, 2012, 8486, ⟨10.1117/12.928692⟩. ⟨hal-01810804⟩
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