Low-loss grating-coupled optical interfaces for large-volume fabrication with deep-ultraviolet optical lithography - Archive ouverte HAL Access content directly
Conference Papers Year : 2018

Low-loss grating-coupled optical interfaces for large-volume fabrication with deep-ultraviolet optical lithography

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hal-01800594 , version 1 (18-09-2018)

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  • HAL Id : hal-01800594 , version 1

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Daniel Benedikovic, Carlos Alberto Alonso-Ramos, Sylvain Guerber, Diego Pérez-Galacho, Vladyslav Vakarin, et al.. Low-loss grating-coupled optical interfaces for large-volume fabrication with deep-ultraviolet optical lithography. SPIE Photonics Europe, Apr 2018, Strasbourg, France. ⟨hal-01800594⟩
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