Low-loss grating-coupled optical interfaces for large-volume fabrication with deep-ultraviolet optical lithography - Archive ouverte HAL Access content directly
Conference Papers Year :

Low-loss grating-coupled optical interfaces for large-volume fabrication with deep-ultraviolet optical lithography

Fichier principal
Vignette du fichier
ProcSPIE_PE2018_manuscript_DB.pdf (1.26 Mo) Télécharger le fichier
Origin : Files produced by the author(s)
Loading...

Dates and versions

hal-01800594 , version 1 (18-09-2018)

Identifiers

  • HAL Id : hal-01800594 , version 1

Cite

Daniel Benedikovic, Carlos Alberto Alonso-Ramos, Sylvain Guerber, Diego Pérez-Galacho, Vladyslav Vakarin, et al.. Low-loss grating-coupled optical interfaces for large-volume fabrication with deep-ultraviolet optical lithography. SPIE Photonics Europe, Apr 2018, Strasbourg, France. ⟨hal-01800594⟩
59 View
169 Download

Share

Gmail Facebook Twitter LinkedIn More