Porosity and Thickness Characterization of Porous Si and Oxidized Porous Si layers – an ultraviolet-visible-mid Infrared Ellipsometry Study - Archive ouverte HAL Accéder directement au contenu
Article Dans Une Revue Microporous and Mesoporous Materials Année : 2016

Porosity and Thickness Characterization of Porous Si and Oxidized Porous Si layers – an ultraviolet-visible-mid Infrared Ellipsometry Study

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hal-01784759 , version 1 (03-05-2018)

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Balint Fodor, Emil Agocs, Benjamin Bardet, Thomas Defforge, Frederic Cayrel, et al.. Porosity and Thickness Characterization of Porous Si and Oxidized Porous Si layers – an ultraviolet-visible-mid Infrared Ellipsometry Study. Microporous and Mesoporous Materials, 2016, 227, pp.112-120. ⟨10.1016/j.micromeso.2016.02.039⟩. ⟨hal-01784759⟩
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