Detecting response of square and circular Si/AlN/Al membranes transducers by Laser Vibrometry Doppler and Impedancemeter - Archive ouverte HAL Accéder directement au contenu
Communication Dans Un Congrès Année : 2015
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hal-01771676 , version 1 (19-04-2018)

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Etienne Herth, Franck Lardet-Vieudrin, Laurie Valbin, Emmanuelle Algre. Detecting response of square and circular Si/AlN/Al membranes transducers by Laser Vibrometry Doppler and Impedancemeter. 2015 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP), Apr 2015, Montpellier, France. ⟨10.1109/DTIP.2015.7160996⟩. ⟨hal-01771676⟩
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