Journal Articles
Microsystem Technologies
Year : 2017
Emmanuelle Algre : Connect in order to contact the contributor
https://hal.science/hal-01771659
Submitted on : Thursday, April 19, 2018-4:35:34 PM
Last modification on : Thursday, April 13, 2023-9:26:12 AM
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Etienne Herth, Laurie Valbin, Franck Lardet-Vieudrin, Emmanuelle Algre. Modeling and detecting response of micromachining square and circular membranes transducers based on AlN thin film piezoelectric layer. Microsystem Technologies, 2017, 23 (9), pp.3873 - 3880. ⟨10.1007/s00542-015-2727-9⟩. ⟨hal-01771659⟩
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