Modeling and detecting response of micromachining square and circular membranes transducers based on AlN thin film piezoelectric layer - Archive ouverte HAL Access content directly
Journal Articles Microsystem Technologies Year : 2017
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hal-01771659 , version 1 (19-04-2018)

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Etienne Herth, Laurie Valbin, Franck Lardet-Vieudrin, Emmanuelle Algre. Modeling and detecting response of micromachining square and circular membranes transducers based on AlN thin film piezoelectric layer. Microsystem Technologies, 2017, 23 (9), pp.3873 - 3880. ⟨10.1007/s00542-015-2727-9⟩. ⟨hal-01771659⟩
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