New comb geometry of capacitive vibration energy harvesters miniaturizing the air damping effect - Archive ouverte HAL
Conference Papers Year : 2017
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hal-01769056 , version 1 (17-04-2018)

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Y. Lu, F. Marty, Dimitri Galayko, Philippe Basset. New comb geometry of capacitive vibration energy harvesters miniaturizing the air damping effect. 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS), Jan 2017, Las Vegas, United States. pp.857-860, ⟨10.1109/MEMSYS.2017.7863543⟩. ⟨hal-01769056⟩
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