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Article Dans Une Revue Plasma Sources Science and Technology Année : 2017

Comparison of three optical diagnostic techniques for the measurement of boron atom density in a H 2 /B 2 H 6 microwave plasma

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hal-01765999 , version 1 (13-04-2018)

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A. Aubert, C. Duluard, N. Sadeghi, A. Gicquel. Comparison of three optical diagnostic techniques for the measurement of boron atom density in a H 2 /B 2 H 6 microwave plasma. Plasma Sources Science and Technology, 2017, 26 (11), ⟨10.1088/1361-6595/aa94d8⟩. ⟨hal-01765999⟩
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