Dark-field electron holography for the measurement of geometric phase - Archive ouverte HAL
Article Dans Une Revue Ultramicroscopy Année : 2011

Dark-field electron holography for the measurement of geometric phase

Résumé

The genesis, theoretical basis and practical application of the new electron holographic dark-field technique for mapping strain in nanostructures are presented. The development places geometric phase within a unified theoretical framework for phase measurements by electron holography. The total phase of the transmitted and diffracted beams is described as a sum of four contributions: crystalline, electrostatic, magnetic and geometric. Each contribution is outlined briefly and leads to the proposal to measure geometric phase by dark-field electron holography (DFEH). The experimental conditions, phase reconstruction and analysis are detailed for off-axis electron holography using examples from the field of semiconductors. A method for correcting for thickness variations will be proposed and demonstrated using the phase from the corresponding bright-field electron hologram.

Dates et versions

hal-01742047 , version 1 (23-03-2018)

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Martin Hÿtch, Florent Houdellier, Florian Hüe, Etienne Snoeck. Dark-field electron holography for the measurement of geometric phase. Ultramicroscopy, 2011, 111 (8), pp.1328 - 1337. ⟨10.1016/j.ultramic.2011.04.008⟩. ⟨hal-01742047⟩
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