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Communication Dans Un Congrès Année : 2003

Mechanisms involved in the transformation of ppHMDSO films into SiO2-like by oxygen plasma treatment

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hal-01741513 , version 1 (23-03-2018)

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  • HAL Id : hal-01741513 , version 1

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G. Borvon, Angelique Bousquet, Antoine Goulet, Agnès Granier, Arie van Der Lee, et al.. Mechanisms involved in the transformation of ppHMDSO films into SiO2-like by oxygen plasma treatment. International Colloquium on Plasma processes (CIP), Jun 2003, Antibes, France. ⟨hal-01741513⟩
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